Spectroscopy Analysis Methods (EDS), Auger Electron Spectroscopy (AES), X-Ray Photoelectron Spectroscopy (XPS)

COMPARISON OF ANALYSIS METHODS Auger Electron Spectroscopy, X-Ray Photoelectron Spectroscopy, Energy/ Wavelength Dispersive Spectroscopy	Home : Comparison of Analysis Methods

Technique	Auger Electron Spectroscopy	X-Ray Photoelectron Spectroscopy	Energy/ Wavelength Dispersive Spectroscopy
Abbreviation	AES	XPS or ESCA	EDS/WDS
Primary Excitation	Electron	X-Ray	Electron
Detected Secondary	Auger Electron	Photoelectron	X-Ray
Elemental Range	3-92	2-92	5-92
Lateral Resolution	200 Å	10 µm	1 µm
Detected Depth	30 Å	30 Å	1 µm
Detection Limit	1%	1%	0.1%
Quantitative?	Semi	Semi	Yes
Accuracy ±	30%	30%	10%
Depth Profile?	Yes	Yes	No
Analyze Insulator	No	Yes	Yes
Identify Organics?	No	Some	No
Chemical State ID?	Some	Yes	No

Technique	X-Ray Fluorescence	X-Ray Diffraction	Secondary Ion Mass Spectrometry, Dynamic	Time - of - Flight SIMS, Static
Abbreviation	XRF	XRD	SIMS	TOF-SIMS
Primary Excitation	X-Ray	X-Ray	Ions	Ions
Detected Secondary	X-Ray	X-Ray	Substrate ions	Substrate ions
Elemental Range	6-92	Crystalline materials	1-92	1-92
Lateral Resolution	1 cm	30 µm	60 µm	1500 Å
Detected Depth	Bulk	0.1-10 µm	0-10 µm	15 Å
Detection Limit	ppb	1%	ppm	0.01%
Quantitative?	Yes	Semi	Yes	Semi
Accuracy ±	10%	10%	30%	100%
Depth Profile?	No	Yes, with angles	yes	No
Analyze Insulator	Yes	Yes	Yes	Yes
Identify Organics?	No	Some crystalline	No	Yes
Chemical State ID?	No	Yes	No	Molecular species

Technique	Fourier Transform Infrared	Raman Microprobe	Atomic Force/ Scanning Tunnelling Microscope
Abbreviation	FTIR	Raman	AFM/STM
Primary Excitation	IR radiation	Laser
Detected Secondary	IR radiation	Photons	Surface Topography
Elemental Range	NA	NA	NA
Lateral Resolution	10-100 µm	2 µm	<0.1 Å
Detected Depth	20 Å-1µm	0.2-10 µm or more if transparent	0.1 Å (vertical resolution)
Detection Limit	ppm	0.1%	NA
Quantitative?	Yes	Poor	NA
Accuracy ±	5%	100%	1-2 Å
Depth Profile?	Yes	Variable	No
Analyze Insulator	Yes	Yes	Yes
Identify Organics?	Yes	Yes	No
Chemical State ID?	Chemical Bond Information	Molecular species	No