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Technical Articles - Quantitative Surface Analysis Archives
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Calculated Auger Sensitivity Factors vs. Handbook
[Updated: 07/20/2007] [Filesize: 604K]
A first principles technique for Auger quantification was used to calculate relative Auger yields. These yields were compared to the experimental sensitivity factors found in the Handbook of Auger Electron Spectroscopy. In cases where pure conductive, elemental standards are readily available, theory and experiment showed good agreement. When pure element standards are not available, as the lanthanide series and the light elements, large deviations exist. Plots of calculated yields for 3, 5, and 10 kV primary beams are superimposed upon the Handbook sensitivity factor graphs and reasons for the similarities and differences are discussed.
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Calculated AES Yields, 1-10kV Primary Beams
[Updated: 08/20/2005] [Filesize: 447K]
Relative values of the calculated Auger yields for the major KLL, LMM, MNN, and NOO transitions are listed for those transitions initiated by 1, 3, 5, and 10 kV primary electron beams. A discussion of the assumptions used in the calculated sensitivity factors outlines the cases in which care must be taken.
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Effect of Transmission Function on AES Yields
[Updated: 06/20/2005] [Filesize: 658K]
It has been shown in other publications that calculated sensitivity factors can be used in many cases for quantification of Auger electron spectroscopy (AES) data. In this study, the effect of various electron tranmission functions on calculated Auger electron spectroscopy sensitivity factors is discussed. The transmission function-corrected calculated sensitivity factors are compared to several available empirical handbook sensitivity factors.
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Quantitative AES of Binary Alloys
[Updated: 05/23/2005] [Filesize: 1,267K]
Quantitative Auger electron spectroscopy (AES) of a number of binary alloys was studied. A first-principles correction scheme was applied to series of chromium/iron, chromium/nickel, and copper/gold alloys. Corrections were made for differences in ionization cross section, Auger transition probability, atomic density, electron escape depth, backscattering factor, and sputtering yield.
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