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SECONDARY ION MASS SPECTROMETRY (TOF-SIMS)	Home : Surface Analysis, Material Analysis : Secondary Ion Mass Spectrometry (TOF-SIMS)

• 10Å depth of analysis
• 1000Å spatial resolution/mapping
• Determination of molecular information (mass/charge ratio)
• Detection of hydrogen
• ppm detection limit

Bond Pad Failure

* Image of bond pad with poor wire bonding	TOF-SIMS spectra of mass-to-change ratio versus intensity. The peaks due to siloxane are clearly present in the failure area.
TOF-SIMS maps of elemental aluminum and silicon and siloxane show the distribution of the contaminant on the surface. Siloxane is mapped distinctly from elemental silicon.

Surface & Material Analysis:
Auger Electron Spectroscopy (AES) | X-Ray Photoelectron Spectroscopy (XPS)
X-Ray Diffraction (XRD) | Secondary Ion Mass Spectroscopy (SIMS)
Electron Microscopy

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