Electron backscatter diffraction is a technique used to examine the crystallographic structure of polished samples. It can be used to determine grain size, crystal orientation and phase identification of metallic samples. Used in combination with EDS, the microstructure of metallic samples can be thoroughly characterized. Using image proessing, the fraction of each phase can be measured.

EBSD is generally an option for field emission scanning electron microscopes. Because localized surface strain alters crystallographic structure, polished samples must be of high quality.

Electron backscatter diffraction (EBSD) phase identification. The fraction of each phase is included.

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